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Multilayer Integrated Film Bulk Acoustic Resonators
949.00 EGP

Multilayer Integrated Film Bulk Acoustic Resonators

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949.00 EGP 

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Category Type
Ergonomics & Human Factors
ISBN
9783642317750
Author
Zhang, Y.
Publisher
Springer-Verlag
Description:

Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano ...

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PRODUCT INFORMATION

  •  

    Specifications

    Category Type
    Ergonomics & Human Factors
    ISBN
    9783642317750
    Item EAN
    2724546113199
    People
    Author
    Zhang, Y.
    People
    Publisher
    Springer-Verlag
    Category Type
    Ergonomics & Human Factors
    ISBN
    9783642317750
    Item EAN
    2724546113199
    People
    Author
    Zhang, Y.
    People
    Publisher
    Springer-Verlag
    Technical Information
    Binding
    Paperback
    Languages and countries
    Book Language
    English
    Read more
  •  

    Description:

    Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated

    Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education's Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang's research group.

    • Multilayer Integrated Film Bulk Acoustic Resonators
    • Author: Zhang, Y.
    • Publisher: Springer-Verlag
    • Published: 2013
 

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